1.
Conference Proceedings
Kim, M.-S. ; Park, J.-H. ; Kim, H.-J. ; Kim, I.-H. ; Jeon, J.-H. ; Gil, M.-G. ; Kim, B.-H.
Pub. info.:
Advances in Resist Technology and Processing XIX . Part Two pp.761-772, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4690
2.
Conference Proceedings
Shim, K.-C. ; Kim, M.-S. ; Lee, E.-S. ; Lee, C.-S. ; Gil, M.-G. ; Kim, B.-H. ; In, J.-S. ; Yoon, T.-B. ; Kim, J.-S.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVI . Part Two pp.919-926, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
3.
Conference Proceedings
Kim, M.-S. ; Shim, K.-C. ; Kim, H.-J. ; Kwon, K.-S. ; Lee, H.-G. ; Lee, C.-S. ; Gil, M.-G. ; Song, Y.-W.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.724-728, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
4.
Conference Proceedings
Kim, M.-S. ; Paek, S.-W. ; Kwak, D.-S. ; Kim, H.-J. ; Lee, C.-S. ; Gil, M.-G. ; Song, Y.-W.
Pub. info.:
Advances in Resist Technology and Processing XX . 2 pp.1242-1247, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039