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16 results

Conference Proceedings

1. Excimer laser patterning of TiN film from metal sacrificial layers

Dowling, A. ; Ghantasala, M.K. ; Hayes, J.P. ; Harvey, E.C. ; Doyle, D.

Pub. info.:	Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.481-488, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4592

Conference Proceedings

2. influence of patterning geometry on the electrodeposition of microstructures fabricated by laser LIGA

Jin, H. ; Davies, S.T. ; Ghantasala, M.K. ; Hayes, J.P. ; Harvey, E.C.

Pub. info.:	Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.489-496, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4592

Conference Proceedings

3. Fabrication, measurement, and modeling of electro-osmotic flow in micromachined polymer microchannels

Suriyage, N.U. ; Ghantasala, M.K. ; Iovenitti, P. ; Harvey, E.C.

Pub. info.:	BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia. pp.149-160, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5275

Conference Proceedings

4. Ion Implantation Seeding of Electroplated Permalloy Films on Silicon

Ghantasala, M.K. ; Sood, D.K.

Pub. info.:	Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS). pp.619-632, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-20

Conference Proceedings

5. Laser LIGA for serpentine Ni microstructures

Jin, H. ; Harvey, E.C. ; Hayes, J.P. ; Ghantasala, M.K. ; Dowling, A. ; Solomon, M. ; Davies, S.T.

Pub. info.:	Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.166-171, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4592

Conference Proceedings

6. Investigation of MoO3-WO3 thin film microstructure for gas sensing applications

Galatsis, K. ; Ghantasala, M.K. ; Li, Y.X. ; Kalantar-Zadeh, K. ; Trinchi, A. ; Wlodarski, W. ; Taurino, A. ; Siciliano, P. ; Cukrov, L.

Pub. info.:	BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia. pp.243-250, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4590

Conference Proceedings

7. Micromachining of TiNi shape memory alloy by excimer laser ablation

Davies, S.T. ; Harvey, E.C. ; Jin, H. ; Hayes, J.P. ; Ghantasala, M.K.

Pub. info.:	Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.88-95, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4592

Conference Proceedings

8. Laser-LIGA for Ni microcantilevers

Jin, H. ; Harvey, E.C. ; Hayes, J.P. ; Ghantasala, M.K. ; Fu, Y. ; Jolic, K. ; Solomon, M. ; Graves, K.

Pub. info.:	Smart structures, devices, and systems : 16-18 December 2002 Melbourne, Australia. pp.263-271, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4935

Conference Proceedings

9. Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer

Dowling, A.J. ; Ghantasala, M.K. ; Evans, P.E. ; Hayes, J.P. ; Harvey, E.C. ; Doyle, E.D.

Pub. info.:	Smart materials II : 16-18 December 2002, Melbourne, Australia. pp.242-249, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4934

10.

Conference Proceedings

10. An investigation of SU-8 resist adhesion in deep x-ray lithography of high-aspect-ratio structures

Barber, R.L. ; Ghantasala, M.K. ; Divan, R. ; Mancini, D.C. ; Harvey, E.C.

Pub. info.:	Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.85-91, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5276

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