1.

Conference Proceedings
Conference Proceedings
1. In-line failure analysis on productive wafers with dual-beam SEM/FIB systems
Weiland,R. ; Boit,C. ; Dawes,N. ; Dziesiaty,A. ; Demm,E. ; Ebersberger,B. ; Frey,L. ; Geyer,S. ; Hirsch,A. ; Lehrer,C. ; Meis,P. ; Kamolz,M. ; Lezec,H. ; Rettenmaier,H. ; Tittes,W. ; Treichler,R. ; Zimmermann,H.
Pub. info.: In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK.  pp.21-30,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4406
2.

Conference Proceedings
Conference Proceedings
2. Silicon Contamination Control by Lifetime Measurements
Zoth,G. ; Geyer,S. ; Schulze,H.-J.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.5-20,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895