1.

Conference Proceedings
Conference Proceedings
1. CHEMICAL VAPOR CLEANING TECHNOLOGiES FOR DRY PROCESSING IN SEMICONDUCTOR MANUFACTURING
Beck, S.E. ; Bohling, D.A. ; Felker, B.S. ; George, M.A. ; Gilicinski, A.G. ; Ivankovits, J.V. ; Langan, J.G. ; Rynders, S.W. ; Norman, J.A.T. ; Roberts, D.A. ; Voloshin, G. ; Hess, D.M. ; Lane, A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.253-263,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. VAPOR PHASE CLEANING OF Cu, Fe, AND Na FROM WAPER SURFACES USING 1,1,1,5,5,5-HEXAFLURO-2,4-PENTANEDIONE
Beck, S.E. ; Robertson, E.A. ; George, M.A. ; Moniot, D.A. ; Waskiewicz, J.L. ; Bohling, D.A. ; Young, K.M. ; Badowski, A.A.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.336-343,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
3.

Conference Proceedings
Conference Proceedings
3. REACTION OF 1,1,1,5,5,5,-HEXAFLUORO-2.4-PENTANEDIONE (hfac) WITH SURFACES OF CuO, Cu2O, AND Cu STUDIED BY XPS
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Ivankovits, J.C. ; Bohling, D.A. ; Felker, B.S. ; Lane, A.P.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.272-280,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
4.

Conference Proceedings
Conference Proceedings
4. THE EffECTS ON SURFACES OF SILICON AND SILICON DIOXIDE EXPOSED TO 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTA- NEDIONE
Beck, S.E. ; Gilicinski, A.G. ; Felker, B.S. ; Langan, J.G. ; George, M.A. ; Bohling, D.A. ; Ivankovits, J.C. ; Roberts, D.A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.264-271,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
5.

Conference Proceedings
Conference Proceedings
5. METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF Al AND CuAl ALLOY FILMS IN A VERTICAL, HIGH-SPEED, ROTATING DISK REACTOR
Tompa, G.S. ; Wolak, E. ; Stall, R.A. ; George, M.A. ; Lippitt, M. ; Norman, John A.T.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.323-328,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
6.

Conference Proceedings
Conference Proceedings
6. *INVESTIGATION OF THE HYDROGEN CONTENT OF SILICON IN AN INTEGRATED RAPID THERMAL PROCESSING REACTOR
George, M.A. ; Beck, S.E. ; Bohling, D.A. ; Hames, G.A. ; Wortman, J.J. ; Melzak, J.A.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.481-492,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
7.

Conference Proceedings
Conference Proceedings
7. Investigation of Reactions of 1,1,1,5,5, 5-Hexafluoro-2,4-Pentanedione (hfac) with Thin Films of CuO and Cu2O
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Ivankovits, J.C. ; Bohling, D.A. ; Felker, B.S. ; Lane, A.P.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994
8.

Conference Proceedings
Conference Proceedings
8. SUB-MONOLAYER IRON AND COPPER REMOVAL BY EXPOSURE TO 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE (H+hfac)
Beck, S.E. ; George, M.A. ; Young, K.M. ; Moniot, D.A. ; Bohling, D.A. ; Badowski, A.A. ; Lane, A.P.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.166-174,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
9.

Conference Proceedings
Conference Proceedings
9. REACTION OF 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE (h+hfac) WITH IRON OXIDE THIN FILMS
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Young, K.M. ; Roberts, D.A. ; Vrtis, R. ; Voloshin, G. ; Bobling, D.A. ; Lane, A.P.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.175-183,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20