1.
|
Conference Proceedings
|
Yang, X.M. ; Eckert, A.R. ; Mountfield, K. ; Gentile, H. ; Seiler, C. ; Brankovic, S. ; Harris, R. ; Johns, E.
Pub. info.: |
Emerging Lithographic Technologies VII. 1 pp.168-177, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5037 |
|
2.
|
Conference Proceedings
|
Eckert, A.R. ; Gentile, H. ; Mountfield, K. ; Seiler, C. ; Yang, X. ; Johns, E.
Pub. info.: |
Emerging Lithographic Technologies VII. 2 pp.1074-1083, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5037 |
|
3.
|
Conference Proceedings
|
Eckert, A.R. ; Bojko, R.J. ; Gentile, H. ; Harris, R. ; Jayashankar, J. ; Johns, E. ; Minor, K. ; Mountfield, K. ; Seiler, C. ; Yang, X.M.
Pub. info.: |
Emerging Lithographic Technologies VI. Part Two pp.878-887, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4688 |
|
4.
|
Conference Proceedings
|
Yang, X.M. ; Gentile, H.
Pub. info.: |
Emerging Lithographic Technologies VIII. pp.558-565, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5374 |
|