1.

Conference Proceedings

Conference Proceedings
Hupcey,M.A.Z. ; Angelopoulos,M. ; Gelorme,J.D. ; Ober,C.K.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.369-374,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
2.

Conference Proceedings

Conference Proceedings
Afzali,A. ; Gelorme,J.D. ; Kosbar,L.L. ; Neisser,M.O. ; Brunswold,W. ; Feild,C. ; Lawson,M. ; Varanasi,R.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.758-767,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
3.

Conference Proceedings

Conference Proceedings
Graham,T.O. ; Afzali,A. ; Angelopoulos,M. ; Gelorme,J.D. ; Shaw,J.M.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.334-343,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
4.

Conference Proceedings

Conference Proceedings
Gelorme,J.D. ; Kosbar,L.L. ; Graham,T.O. ; Afzali,A.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.559-568,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999