Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.403-408, 2003. Warrendale, Pa.. Materials Research Society
Nandini, Alok ; Roy, U. ; Mallikarjunan, A. ; Kumar, A. ; Fortin, J. ; Shekhawat, G.S. ; Geer, Robert ; Dovidenko, Katherine ; Lifshin, Eric ; Bakhru, H. ; Lu, T.-M.
Pub. info.:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.349-354, 2002. Warrendale. Materials Research Society