Garone, P. M. ; Sturm,. J. C. ; Schwartz, P. V. ; Schwarz, S. A. ; Wilkens, B.
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.41-46, 1989. Pittsburgh, Pa.. Materials Research Society