1.

Conference Proceedings
Conference Proceedings
1. Fabrication and Characterization of PZT Thin Film on Bulk Micromachined Si Motion Detectors
Garino, T. J. ; Tuttle, B. A. ; Laguna, G. ; Clem, P.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.629-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
2.

Conference Proceedings
Conference Proceedings
2. Integrated Decoupling Capacitors Using Pb(Zr,Ti)O3 Thin Films
Dimos, D. ; Lockwood, S. J. ; Garino, T. J. ; Al-Shareef, H. N. ; Schwartz, R. W.
Pub. info.: Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A..  pp.305-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 433