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Conference Proceedings
Conference Proceedings
1. INVITED: NITROGEN ENGINEERING OF ULTRATHIN SILICON OXYNITRIDES
Green, M.L. ; Gusev, E.P. ; Lu, H. ; Garfunkel, E. ; Gustafsson, T. ; Lennard, W.N.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.745-759,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
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Conference Proceedings
Conference Proceedings
2. Quantum Chemical Study of ZrO2 Atomic Layer Deposition on the SiO2 Surface
Gao, G. ; Han, J. ; Widjaja, Y. ; Garfunkel, E. ; Musgrave, C.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.1-14,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
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Conference Proceedings
Conference Proceedings
3. Integration Issues with High k Gate Stacks*
Osburn, C.M. ; Han, S.K. ; Kim, I. ; Campbell, S.A. ; Garfunkel, E. ; Gustafson, T. ; Hauser, J. ; King, T.-J. ; Liu, Q. ; Ranade, P. ; Kingon, A. ; Kwong, D.-L. ; Lee, S.J. ; Lee, C.H. ; Lee, J. ; Onishi, K. ; Kang, C.S. ; Choi, R. ; Cho, H. ; Nich, R. ; Lucovsky, G. ; Hong, J.G. ; Ma, T.P. ; Zhu, W. ; Luo, Z. ; Maria, J.P. ; Wicaksana, D. ; Misra, V. ; Lee, J.J. ; Suh, Y.S. ; Parksons, G. ; Niu, D. ; Stemmer, S.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.375-390,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
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Conference Proceedings
Conference Proceedings
4. ON THE MECHANISM OF ULTRA THIN SILICON OXIDE FILM GROWTH DURING THERMAL OXIDATION
Gusev, E. P. ; Lu, H. C. ; Gustafsson, T. ; Garfunkel, E.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.69-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318
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Conference Proceedings
Conference Proceedings
5. Band Alignment Issues in Metal/Dielectric Stacks: A Combined Photoemission and Inverse Photoemission Study of the HfO2/Pt and HfO2/Hf Systems
Sayan, S. ; Bartynski, R.A. ; Robertson, J. ; Suehle, J.S. ; Vogel, E. ; Nguyen, N.V. ; Ehrstein, J. ; Kopanski, J.J. ; Suzer, S. ; Holl, M.B. ; Garfunkel, E.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.255-263,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
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Conference Proceedings
Conference Proceedings
6. New Features of Silicon Oxidation in the Ultrathin Regime: An Ion Scattering Study
Gusev, E. ; Lu, H.C. ; Gustafsson, T. ; Garfunkel, E.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.49-58,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1
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Conference Proceedings
Conference Proceedings
7. Conductance of molecular nanojunctions: roles of surface topography and metal contacts (Invited Paper)
Zhitenev, N. ; Erbe, A. ; Bao, Z. ; Jiang, W. ; Garfunkel, E.
Pub. info.: Nanofabrication: Technologies, Devices, and Applications.  pp.91-99,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5592