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Conference Proceedings

1. IN-SITU RAPID THERMAL ANNEALING OF HETEROSTRUCTURES GROWN BY MOLECULAR BEAM EPITAXY

Cerullo, M. ; Phillips, J. M. ; Anzlowar, M. ; Pfeiffer, L. ; Batstone, J.L ; Galiano, M.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.253-258, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Conference Proceedings

2. Gap Fill and Film Reflow Capability of Sub-Atmospheric Chemical Vapor Deposited Borophosphosilicate Glass

Robles, S. ; Russell, K. ; Galiano, M. ; Siva, V. ; Kitheart, V. ; Nguyen, B.C.

Pub. info.:	ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.327-338, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-5

Conference Proceedings

3. IN-SITU RAPID THERMAL ANNEALING OF HETEROSTRUCTURES GROWN BY MOLECULAR BEAM EPITAXY

Cerullo, M. ; Phillipis, Julia M. ; Anzlowar, M. ; Pfeiffer, L. ; Batstone, J. L. ; Galiano, M.

Pub. info.:	Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.355-360, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	102

Conference Proceedings

4. STUDIES OF PECVD AND OZONE CVD DEPOSITION RATE, UNIFORMITY AND STEP COVERAGE

Guo, Xin ; Zhao, J. ; Qiao, J. ; Tabata, A. ; Pang, B. ; Galiano, M. ; Sinha, A.

Pub. info.:	Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.. pp.113-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	363