1.

Conference Proceedings
Conference Proceedings
1. STRUCTURAL CHARACTERIZATION OF DYNAMIC ANNEALING EFFECTS OF P+ IMPLANTED Si
Berti, Marina ; Drigo, A. V. ; Gabilli, E. ; Lotti, R. ; Lulli, G ; Merli, P. G. ; Vittori Antimari, M.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.97-102,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
2.

Conference Proceedings
Conference Proceedings
2. RADIATION DAMAGE INDUCED TRANSIENT ENHANCED DIFFUSION OF DOPANTS IN SILICON
Angelucci, R. ; Gabilli, E. ; Lotti, R. ; Negrini, P. ; Servidori, M. ; Solmi, S. ; Anderle, M.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.505-510,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
3.

Conference Proceedings
Conference Proceedings
3. As AND B ION IMPLANTATION THROUGH Mo AND INTO Mo-SILICIDE LAYERS FOR SHALLOW JUNCTION FORMATION
Angelucci, R. ; Merli, M. ; Solmi, S. ; Armigliato, A. ; Gabilli, E. ; Govoni, D. ; Poggi, A.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.751-758,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157