1.

Conference Proceedings
Conference Proceedings
1. Development of a silicon microprobe for NO detection
Fontes,M.B.A. ; Santiago-Aviles,J.J. ; Furlan,R.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.64-71,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
2.

Conference Proceedings
Conference Proceedings
2. Micromechanical structure development for chemical analysis:study of porous silicon as an adsorbent
Souza,S.G. ; Galeazzo,E. ; Silva,M.L.P. ; Furlan,R. ; Fernandez,F.J.R.
Pub. info.: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.376-384,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3891