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20 results

Conference Proceedings

1. Ohmic Contact for C-face n-Type 4H-SiC with Reduced Graphite Precipitation

Maeyama, Y. ; Nishikawa, K. ; Fukuda, Y. ; Shimizu, M. ; Sato, M. ; Ono, J. ; Iwakuro, H.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.867-870, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

2. An Investigation of Deformation in Copper Single Crystals Using Equal-Channel Angular Pressing

Furukawa, M. ; Fukuda, Y. ; Oh-ishi, K. ; Horita, Z. ; Langdon, T.G.

Pub. info.:	Nanomaterials by severe plastic deformation : NanoSPD3 : proceedings of the 3rd Conference on Nanomaterials by Severe Plastic Deformation held at Fukuoka, Japan on September 22-26, 2005. pp.113-118, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	503-504

Conference Proceedings

3. Hot Corrosion and Steam Oxidation Properties of New Heat Resistant Steels for Ultra Super Critical Boilers

Fukuda, Y. ; Shimizu, M.

Pub. info.:	High-temperature oxidation and corrosion 2005 : proceedings of the International Symposium on High-Temperature Oxidation and Corrosion 2005 , Nara, Japan, 30th November - 2nd December 2005. pp.189-196, 2006. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	522-523

Conference Proceedings

4. Real-time damage localization by means of MEMS sensors and use of wireless data transmission (Invited Paper) [6178-11]

Shinozuka, M. ; Park, C. ; Chou, P. H. ; Fukuda, Y.

Pub. info.:	Nonintrusive inspection, structures monitoring, and smart systems for homeland security : 27-28 February 2006, San Diego, California, USA. pp.61780A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6178

Conference Proceedings

5. Fully Depleted SIMOX SOI Process Technology for Low Power Digital and RF Device

Itoh, M. ; Kawai, Y. ; Ito, S. ; Yokomizo, K. ; Katakura, Y. ; Fukuda, Y. ; Ichikawa, F.

Pub. info.:	Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.331-336, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-3

Conference Proceedings

6. Sputtered Pb(Ze,Ti)O3 thin films for ferroelectric capacitors

Sakoda, T. ; Aoki, K. ; Fukuda, Y.

Pub. info.:	Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.277-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	596

Conference Proceedings

7. Point-Contact Current Voltage Technique for Depth Profiling of Dopants in Silicon Carbide

Fukuda, Y. ; Nishikawa, K. ; Shimizu, M. ; Iwakuro, H.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.671-674, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

Conference Proceedings

8. X-ray radiation of clusters irradiated by ultrafast high-intensity laser pulses

Fukuda, Y. ; Akahane, Y. ; Aoyama, M. ; Inoue, N. ; Ueda, H. ; Kishimoto, Y. ; Yamakawa, K. ; Faenov, A. Ya. ; Magunov, A. I. ; Pikuz, T. A. ; Skobelev, I. Y. ; Abdallah, J. Jr. ; Csanak, G. ; Boldarev, A. S. ; Gasilov, V. A.

Pub. info.:	Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA. pp.234-243, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5196

Conference Proceedings

9. EPL performance in 65-nm node metallization technology and beyond

Kakutani, Y. ; Niibe, M. ; Takase, H. ; Terashima, S. ; Kondo, H. ; Matsunari, S. ; Aoki, T. ; Gomei, Y. ; Fukuda, Y.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.501-508, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

10.

Conference Proceedings

10. A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU

Kakutani, Y. ; Niibe, M. ; Kakiuchi, K. ; Takase, H. ; Terashima, S. ; Kondo, H. ; Matsunari, S. ; Aoki, T. ; Gomei, Y. ; Fukuda, Y.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.47-57, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5533

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