Terai, T. ; Tamai, N. ; Fukuda, T. ; Kakeshita, T.
Pub. info.:
Advanced structural and functional materials design : proceedings of the International Symposium on Advanced Structural and Functional Materials Design, Osaka, Japan, November 10th-12th, 2004. pp.223-226, 2006. Switzerland. Trans Tech Publications
Choi, M.S. ; Ogawa, J. ; Fukuda, T. ; Kakeshita, T.
Pub. info.:
Advanced structural and functional materials design : proceedings of the International Symposium on Advanced Structural and Functional Materials Design, Osaka, Japan, November 10th-12th, 2004. pp.233-238, 2006. Switzerland. Trans Tech Publications
Murata, T. ; Terai, T. ; Fukuda, T. ; Kakeshita, T.
Pub. info.:
Advanced structural and functional materials design : proceedings of the International Symposium on Advanced Structural and Functional Materials Design, Osaka, Japan, November 10th-12th, 2004. pp.183-188, 2006. Switzerland. Trans Tech Publications
Advanced structural and functional materials design : proceedings of the International Symposium on Advanced Structural and Functional Materials Design, Osaka, Japan, November 10th-12th, 2004. pp.189-194, 2006. Switzerland. Trans Tech Publications
Advanced structural and functional materials design : proceedings of the International Symposium on Advanced Structural and Functional Materials Design, Osaka, Japan, November 10th-12th, 2004. pp.201-204, 2006. Switzerland. Trans Tech Publications
Hatanaka, Y. ; Yanagi, H. ; Nawata, T. ; Inui, Y. ; Mabuchi, T. ; Yasumura, K. ; Nishijima, E. ; Fukuda, T.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.599-610, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.231-236, 2003. Pennington, N.J.. Electrochemical Society
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.969-974, 1990. Pittsburgh, Pa.. Materials Research Society
Smart structures and materials 2003 : Smart structures and integrated systems : 3-6 March 2003, San Diego, California, USA. pp.41-48, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering