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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.422-427, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.400-405, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.205-215, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering