1.

Conference Proceedings
Conference Proceedings
1. Characterization of CD control for sub-0.18-ｦﾌm lithographic patterning
Sturtevant,J.L. ; Allgair,J. ; Fu,C.-C. ; Green,K.G. ; Hershey,R.R. ; Kling,M.E. ; Litt,L.C. ; Lucas,K.D. ; Roman,B.J. ; Seligman,C.S. ; Schippers,M.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.220-227,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Practicing extension of 248-nm DUV optical lithography using trim-mask PSM
Kling,M.E. ; Cave,N. ; Falch,B.J. ; Fu,C.-C. ; Green,K.G. ; Lucas,K.D. ; Roman,B.J. ; Reich,A.J. ; Sturtevant,J.L. ; Tian,R. ; Russell,D.R. ; Karklin,L. ; Wang,Y.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.10-17,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings
Conference Proceedings
3. Pairing symmetry and spin-polarized quasiparticle transport in high-temperature superconducting cuprates
Yeh,N.-C. ; Fu,C.-C. ; Chen,C.-T. ; Huang,Z. ; Vasquez,R.P. ; Tajima,S.
Pub. info.: Superconducting and related oxides, physics and nanoengineering IV : 24-28 April 2000, Orlando, USA.  pp.60-74,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4058
4.

Conference Proceedings
Conference Proceedings
4. Effects of complementary phase-shift imaging on gate CD control
Nelson-Thomas,C. ; Kling,M.E. ; Thompson,M.A. ; Wang,R. ; Cave,N. ; Fu,C.-C.
Pub. info.: Optical Microlithography XIV.  4346  pp.464-470,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
5.

Conference Proceedings
Conference Proceedings
5. Gate-Length-and threshold-voltage-dependent nonlinearity in the hot carrier DC Lifetime extrapolation for sub-100-nm NMOS devices
Chheda,S.N. ; Bhat,N. ; Tsui,P. ; Gonzales,S. ; Cave,N. ; Fu,C.-C. ; Huang,F. ; Nangia,A. ; Choi,P.S.-J. ; Collins,S.
Pub. info.: Microelectronic Device Technology III.  pp.175-185,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3881