1.

Conference Proceedings
Conference Proceedings
1. Comparison of the Electromigration Behavior of Al(MgCu) With Al(Cu) and Al(SiCu)
Li, Hua ; Witvrouw, Ann ; Jin, Sing ; Bender, Hugo ; Maex, Karen ; Froyen, Ludo
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.133-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. Segregation of Cu on Etched and Non-Etched Al(Cu) Surface
Li, Hua ; Maex, Karen ; Brijs, Bert ; Conard, Thierry ; Vandervorst, Wilfried ; Baklanov, Michael ; Boullart, Werner ; Froyen, Ludo
Pub. info.: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.77-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 516