1.

Conference Proceedings
Conference Proceedings
1. Damping caused by the gas flow in the holes of perforated structures
Yang, H. ; Bao, M. ; Pakula, L. ; French, P.J.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.307-313,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4593
2.

Conference Proceedings
Conference Proceedings
2. Low Temperature Single-SI Poly-SI Direct Bonding (SPSDB) Technique without CMP
Jiao, J. ; French, P.J.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.453-458,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of mechanical structures using macroporous silicon
Ohji, H. ; Izuo, S. ; French, P.J. ; Tsutsumi, K.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.96-103,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
4.

Conference Proceedings
Conference Proceedings
4. Fast-sampling multipixel detector for a heterodyne interferometer with angstrom precision
Soloviev, O. ; Vdovin, G.V. ; Krieg, L.M. ; Monteiro, D.W.L. ; Braat, J.J.M. ; French, P.J.
Pub. info.: Photonics, devices, and systems II :Proceedings from PHOTONICS PRAGUE 2002, 26-29 May 2002, Prague, Czech Republic, Miroslav Hrabovský, Dagmar Senderáková, Pavel Tománek, chairs/editors ; Organized by CSSF--Czech and Slovak Society for Photonics, Tech-Market.  pp.25-30,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5036
5.

Conference Proceedings
Conference Proceedings
5. New etchant for the fabrication of porous silicon
O'Halloran, G.M. ; Kuhl, M. ; Sarro, P.M. ; Gennison, P.T.J. ; French, P.J.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.180-185,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
6.

Conference Proceedings
Conference Proceedings
6. Fabrication of 3-D Structure on P-Type Silicon Using Electrochemical Etching
Izuo, S. ; Saitoh, F. ; Obji, H. ; Fukami, T. ; French, P.J. ; Tsutsumi, K.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.387-396,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20