1.

Conference Proceedings
Conference Proceedings
1. SPECKLE TECHNIQUES FOR NONCONTACT TEMPERATURE MEASUREMENT
Burckel, D. ; Zaidi, S. H. ; Lang, M. K. ; Frauenglass, A. ; Brueck, S. R. J.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.17-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
2.

Conference Proceedings
Conference Proceedings
2. 244-nm imaging interferometric lithography test bed [6154-95]
Smolev, S. ; Biswas, A. ; Frauenglass, A. ; Brueck, S. R. J.
Pub. info.: Optical Microlithography XIX.  pp.61542K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings
Conference Proceedings
3. Deep-UV immersion interferometric lithography
Raub, A.K. ; Frauenglass, A. ; Brueck, S.R.J. ; Conley, W. ; Dammel, R.R. ; Romano, A. ; Sato, M. ; Hinsberg, W.
Pub. info.: Optical Microlithography XVII.  pp.306-318,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
4.

Conference Proceedings
Conference Proceedings
4. Simulation of the 45-nm half-pitch node with 193-nm immersion lithography
Biswas, A.M. ; Frauenglass, A. ; Brueck, S.R.J.
Pub. info.: Optical Microlithography XVII.  pp.1579-1586,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377