1.

Conference Proceedings
Conference Proceedings
1. DOE manufacture with the DUV SLM-based Sigma7300 laser pattern generator
Bjyrnyngen, P. ; Ekberg, M. ; ystrym, T. ; Fosshaug, H.A. ; Karlsson, J. ; Bjyrnberg, C. ; Nikolajeff, F.K. ; Karlsson, M.
Pub. info.: Optical Microlithography XVII.  pp.1866-1875,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings
Conference Proceedings
2. Airborne molecular contamination control in the micromirror SLM-based deep ultraviolet DUV SIGMA7300 laser pattern generator
Ekberg, M. ; Fosshaug, H.A. ; Ostrom, T. ; Bjornangen, P. ; Utterback, T. ; Skotte, P.-U. ; Higley, J. ; Ruede, D. ; Kishkovich, O.P.
Pub. info.: Optical Microlithography XVII.  pp.1843-1857,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings
Conference Proceedings
3. PSM alignment for Sigma7300: signal quality and resist effects from using the writing DUV laser light spatial light modulator and a CCD camera as measurement tool for 2:nd layer alignment metrology
Ostrom, T. ; Lindau, S. ; Ekberg, M. ; Fosshaug, H.A. ; Zerne, R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1039-1049,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings
Conference Proceedings
4. Resist process optimization for a DUV laser pattern generator
Fosshaug, H.A. ; Bajramovic, A. ; Karlsson, J. ; Xing, K. ; Rosendahl, A. ; Dahlberg, A. ; Bjoernberg, C. ; Bjuggren, M. ; Sandstrom, T.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.355-365,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
5.

Conference Proceedings
Conference Proceedings
5. Properties of a 248-nm DUV laser mask pattern generator for the 90-nm and 65-nm technology nodes
Aman, J. ; Fosshaug, H.A. ; Hedqvist, T. ; Harkesjo, J. ; Hogfeldt, P. ; Jacobsson, M. ; Karawajczyk, A. ; Karlsson, J. ; Rosling, M. ; Sjoberg, H.J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.684-694,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256