1.

Conference Proceedings
Conference Proceedings
1. Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region [5963-40]
Sandner, T. ; Schmidt, J. U. ; Schnenk, H. ; Lakner, H. ; Yang, M. ; Gatto, A. ; Kaiser, N. ; Braun, S. ; Foltyn, T. ; Leson, A.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.596314-596314,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
2.

Conference Proceedings
Conference Proceedings
2. Deposition of multilayer mirrors with arbitrary period thickness distributions
Foltyn, T. ; Braun, S. ; Moss, M. ; Leson, A.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA.  pp.124-133,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5193
3.

Conference Proceedings
Conference Proceedings
3. Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Leson, A.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.75-84,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533
4.

Conference Proceedings
Conference Proceedings
4. Multi component EUV multilayer mirrors
Braun, S. ; Foltyn, T. ; Loyen, L. ; Moss, M. ; Leson, A.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.274-285,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
5.

Conference Proceedings
Conference Proceedings
5. Carbon buffer layers for smoothing substrates of EUV and x-ray multilayer mirrors
Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Weissbach, D.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems II.  pp.132-140,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5392
6.

Conference Proceedings
Conference Proceedings
6. Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region (Invited Paper) [6114-19]
Sandner, T. ; Schmidt, J. U. ; Schenk, H. ; Lakner, H. ; Yang, M. ; Gatto, A. ; Kaiser, N. ; Braun, S. ; Foltyn, T. ; Leson, A.
Pub. info.: MOEMS Display, Imaging, and Miniaturized Microsystems IV.  pp.61140H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6114
7.

Conference Proceedings
Conference Proceedings
7. Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications
Sandner, T. ; Schmidt, J.U. ; Schenk, H. ; Lakner, H. ; Braun, S. ; Foltyn, T. ; Leson, A. ; Gatto, A. ; Yang, M. ; Kaiser, N.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.34-42,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721
8.

Conference Proceedings
Conference Proceedings
8. Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, T. ; Schmidt, J.U. ; Schenk, H. ; Lakner, H. ; Gatto, A. ; Yang, M. ; Kaiser, N. ; Braun, S. ; Foltyn, T. ; Leson, A.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.72-80,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721