Fleurov, V. B. ; Oh, P. C. ; Steiger, T. D. ; Fomenkov, I. V. ; Partlo, W. N.
Pub. info.:
Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.293-300, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fomenkov, I V. ; Hanssaon, B. A. M. ; Boering, N. R. ; Ershov, A. I. ; Partlo, W. N. ; Fleurov, V. B. ; Khodykin, O. V. ; Bykanov, A. N. ; Rettig, C. L. ; Hoffman,J.R. ; Vargas, E. ; Chavez,L,J.A. ; Marx,W.F. ; Brant, D. C.
Pub. info.:
Emerging Lithographic Technologies X. pp.61513X-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering