1.

Conference Proceedings
Conference Proceedings
1. Polarization effects associated with hyper-numerical aperture (NA>1) lithography
Flagello, D. G.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.44-54,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings
Conference Proceedings
2. Optical lithography for nanotechnology (Invited Paper) [6327-15]
Flagello, D. G. ; Arnold, B.
Pub. info.: Nanoengineering : fabrication, properties, optics, and devices III : 15-17 August, 2006, San Diego, California, USA.  pp.63270D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6327
3.

Conference Proceedings
Conference Proceedings
3. The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging [5992-37]
Geh, B. ; Flagello, D. G. ; Pregler, C. ; Martin, P. M. ; Leunissen, L. H. A. ; Hansen, S. ; de Boeij, W.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599210-599210,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
4.

Conference Proceedings
Conference Proceedings
4. Practical approach to full-field wavefront aberration measurement using phase wheel targets [6154-35]
Zavyalova, L. V. ; Smith, B. W. ; Bourov, A. ; Zhang, G. ; Vellanki, V. ; Reynolds, P. ; Flagello, D. G.
Pub. info.: Optical Microlithography XIX.  pp.61540Y-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154