1.

Conference Proceedings
Conference Proceedings
1. A STUDY OF THE ION IMPLANTED ARSENIC TAIL IN SILICON
Beck, S. E. ; Jaccodine, R. J. ; Filo, A. J. ; Irwin, R.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.219-222,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
2.

Conference Proceedings
Conference Proceedings
2. MeV BORON IMPLANTATION AND MASKING
Lavine, James P. ; Filo, A. J. ; Losee, D. L. ; Guidash, P. A. ; Lee, S.-T. ; Braunstein, G. H. ; Kosman, S. L. ; Kyan, H.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.361-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316