1.

Conference Proceedings
Conference Proceedings
1. HEATING RATE EFFECTS IN RAPID THERMAL ANNEALING OF ARSENIC IMPLANTED SILICON
Souza, J. P. de ; Fichtner, P. F. P. ; Sadana, D. K.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.351-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
2.

Conference Proceedings
Conference Proceedings
2. Improving the Thermal Stability of Photoresist Films by Ion-Beam Irradiation
Zawislak, F. C. ; Garcia, Irene T. S. ; Samios, D. ; Baptista, D. L. ; Fichtner, P. F. P. ; Alves, E. ; Silva, Maria F. da ; Soares, J. C.
Pub. info.: Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A..  pp.443-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 504
3.

Conference Proceedings
Conference Proceedings
3. Helium-Induced Cavities in Silicon: Their Formation, Microstructure, and Gettering Ability
Kaschny, J. R. ; Fichtner, P. F. P. ; Muecklich, A. ; Kreissig, U. ; Yankov, R. A. ; Kogler, R. ; Danilin, A. B. ; Skorupa, W.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.451-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469