1.

Conference Proceedings
Conference Proceedings
1. VPD-DSE-studies of metal impurities on silicon: A comparison of TXRF and radiochemical analysis
Metz, S. ; Kilian, G. ; Mainka, G. ; Angelkort, C. ; Rittmeyer, C. ; Stelter, H. ; Fester, A. ; Kolbesen, B.O.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.458-467,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
2.

Conference Proceedings
Conference Proceedings
2. TXRF and radiochemical analysis. A comparison of two analytical tools for determination of metal impurities on silicon surfaces
Fester, A. ; Metz, S. ; Mainka, G. ; Angelkort, C. ; Martin, A.R. ; Herrmann, H. ; Kolbesen, B.O.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.228-235,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
3.

Conference Proceedings
Conference Proceedings
3. ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL
Onsia, B. ; Schellkes, E. ; Vos, R. ; De Gendt, S. ; Doll, O. ; Fester, A. ; Kolbesen, B. ; Hoffman, M. ; Hatcher, Z. ; Wolke, K. ; Mertens, P. ; Heyns, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.23-30,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26