1.

Conference Proceedings
Conference Proceedings
1. CHEMICAL VAPOR CLEANING TECHNOLOGiES FOR DRY PROCESSING IN SEMICONDUCTOR MANUFACTURING
Beck, S.E. ; Bohling, D.A. ; Felker, B.S. ; George, M.A. ; Gilicinski, A.G. ; Ivankovits, J.V. ; Langan, J.G. ; Rynders, S.W. ; Norman, J.A.T. ; Roberts, D.A. ; Voloshin, G. ; Hess, D.M. ; Lane, A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.253-263,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. REACTION OF 1,1,1,5,5,5,-HEXAFLUORO-2.4-PENTANEDIONE (hfac) WITH SURFACES OF CuO, Cu2O, AND Cu STUDIED BY XPS
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Ivankovits, J.C. ; Bohling, D.A. ; Felker, B.S. ; Lane, A.P.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.272-280,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
3.

Conference Proceedings
Conference Proceedings
3. THE EffECTS ON SURFACES OF SILICON AND SILICON DIOXIDE EXPOSED TO 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTA- NEDIONE
Beck, S.E. ; Gilicinski, A.G. ; Felker, B.S. ; Langan, J.G. ; George, M.A. ; Bohling, D.A. ; Ivankovits, J.C. ; Roberts, D.A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.264-271,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
4.

Conference Proceedings
Conference Proceedings
4. Investigation of Reactions of 1,1,1,5,5, 5-Hexafluoro-2,4-Pentanedione (hfac) with Thin Films of CuO and Cu2O
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Ivankovits, J.C. ; Bohling, D.A. ; Felker, B.S. ; Lane, A.P.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994