1.

Conference Proceedings
Conference Proceedings
1. Approach to pattern aspect ratio control
Thomas,A.C. ; Zach,F.X. ; Wong,A.K. ; Ferguson,R.A. ; Samuels,D.J. ; Longo,R. ; Zhu,J. ; Feild,C.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.839-846,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Advanced negative resists using novel aminoplast crosslinkers
Afzali,A. ; Gelorme,J.D. ; Kosbar,L.L. ; Neisser,M.O. ; Brunswold,W. ; Feild,C. ; Lawson,M. ; Varanasi,R.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.758-767,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333