1.

Conference Proceedings
Conference Proceedings
1. In-line characterization of silicon nano-crystals grown on high-K tunnel dielectrics [5878-05]
Nolot, E. ; Mur, P. ; Favier, S.
Pub. info.: Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA.  pp.587805-587805,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5878
2.

Conference Proceedings
Conference Proceedings
2. (19.3) 1:50 - 2:10 PM - Understanding and Improvement of the SiGe Wet Selective Etch for the sSOI Manufacturing by the Smart Cut Process
Rayssac, O. ; Besson, P. ; Loup, V. ; Aulnette, C. ; Favier, S. ; Osternaud, B. ; Portigliatti, L. ; Cayrefourcq, I. (SOITEC)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.1135-1144,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07
3.

Conference Proceedings
Conference Proceedings
3. EUV mask blank: defect detection at 100 nm
Hue, J. ; Quesnel, E. ; Pelle, C. ; Muffato, V. ; Carini, G ; Favier, S. ; Besson, P.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.860-871,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037