1.

Conference Proceedings
Conference Proceedings
1. Calculation of the Liquidus and Solidus Surface of Al Rich Corner of Al-Mg-Si Alloy System by ESTPHAD Method
Farkas, J. ; Roosz, A.
Pub. info.: Solidification and gravity IV : proceedings of the 4th International Conference on Solidification and Gravity, held in Miskolc-Lillafured, Hungary, September 6-9, 2004.  pp.635-640,  2006.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 508
2.

Conference Proceedings
Conference Proceedings
2. Development of a Copper CMP Process for Multilevel, Dual Inlaid Metallization in Semiconductor Devices
Selinidis, S.R. ; Watts, D.K. ; Saravia, J. ; Gomez, J. ; Dang, C. ; Islam, R. ; Klein, J. ; Farkas, J.
Pub. info.: Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing.  pp.9-18,  1998.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-7
3.

Conference Proceedings
Conference Proceedings
3. Integration Challenges of Inorganic Low-k (k ｡？2.5) Materials With Cu for Sub-0.25 ｦﾌm Multilevel Interconnects
Yu, K. C. ; Defilippi, J. ; Tiwari, R. ; Sparks, T. ; Smith, D. ; Olivares, M. ; Selinidis, S. ; Zhang, J. ; Junker, K. ; Braekelmann, G. ; Farkas, J. ; Lee, K. S. ; Filipiak, S. ; Lindell, M. ; Watanabe, J. K. ; Wetzel, J. T. ; Jawarani, D. ; Herrick, M. T. ; Cave, N. G. ; Hobbs, C. C.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.499-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. Integration of Multi-Level Copper Metallization into a High-Performance Sub-0.25 ｦﾌm Technology
Venkatraman, R. ; Jain, A. ; Farkas, J. ; Mendonca, J. ; Hamilton, G. ; Capasso, C. ; Denning, D. ; Simpson, C. ; Rogers, B. ; Frisa, L. ; Ong, T. P. ; Herrick, M. ; Kaushik, V. ; Gregory, R. ; Apen, E. ; Angyal, M. ; Filipiak, S. ; Crabtree, P. ; Sparks, T. ; Anderson, S.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.41-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
5.

Conference Proceedings
Conference Proceedings
5. Integration Challenges of Inorganic Low-K (K < 2.5) Materials With Cu for Sub-0.25)μm Multilevel Interconnects
Blumenthal, R. ; Braekelmann, G. ; Cave, N. G. ; Conner, J. ; Crabtree, P. ; Defilippi, J. ; Denning, D. ; Farkas, J. ; Filipiak, S. ; Fowler, B. W. ; Fox, R. ; Freeman, M. ; Garcia, S. ; Herrick, M. T. ; Hershey, R. ; Hobbs, C. C. ; Jawarani, D. ; Junker, K. ; Keyes, C. ; Kirksey, S. ; Lee, J. J. ; Lee, K. S. ; Lindell, M. ; Mora, R. ; Neil, T. ; Nguyen, T. ; Olivares, M. ; Pena, T. Newton. D. ; Selinidis, S. ; Sieloff, D. D. ; Smith, D. ; Sparks, T. ; Stankus, JJ. ; Tiwari, R. ; VanGompel, T. ; Watanabe, J. K. ; Weitzman, E. J. ; Wetzel, J. T. ; Yu, K. C. ; Zhang, J.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.151-160,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565
6.

Conference Proceedings
Conference Proceedings
6. Thermodynamics-Based Semi-Empirical Description of the Liquidus Surface and Partition Coefficients in Ternary Al-Mg-Si Alloy
Roosz, A. ; Farkas, J. ; Kaptay, G.
Pub. info.: 3rd Hungarian Conference on Materials Science, Testing and Informatics.  pp.323-328,  2003.  Zuerich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 414-415
7.

Conference Proceedings
Conference Proceedings
7. PASSIVATION OF SILICON DIOXIDE SURFACE HYDROXYL GROUPS TO CONTROL SELECTIVITY DURING CHEMICAL VAPOR DEPOSITION OF COPPER FROM COPPER(I) COMPOUNDS
Jain, Ajay ; Farkas, J. ; Kodas, T. T. ; Hampden-Smith, M. J. ; Gelatos, A. V. ; Marsh, R. ; Mogab, C. J.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.105-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315