Mule'Stagno, L. ; Bazzali, A. ; Olmo, M. ; Toeroek, P. ; Faister, R. ; Fraundorf, P.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.431-437, 1997. Pennington, NJ. Electrochemical Society