Fasching, R. J. ; Bai, S. -J. ; Fabian, T. ; Prinz, F. B.
Pub. info.:
Micromachining and Microfabrication Process Technology XI. pp.610902-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering