1.

Conference Proceedings
Conference Proceedings
1. Comparison of TiN Thin Films Grown on SiO2 by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering
F. Magnus ; A. S. Ingason ; O. B. Sveinsson ; S. Olafsson ; J. T. Gudmundsson
Pub. info.: Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A..  pp.93-98,  2012.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1335
2.

Conference Proceedings
Conference Proceedings
2. Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering
F. Magnus ; B. Agnarsson ; A.S. Ingason ; K. Leosson ; S. Olafsson ; J.T. Gudmundsson
Pub. info.: Titanium dioxide nanomaterials : symposium held April 25-29, 2011, San Francisco, California, U.S.A..  pp.39-46,  2012.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1352