1.

Conference Proceedings
Conference Proceedings
1. Carboxylic Acids as Oxygen Supplying Agents for Atomic Layer Deposition of High-κ Thin Films
E. Rauwel ; F. Ducroquet ; P. Rauwel ; M. Willinger ; I. Matko
Pub. info.: Atomic layer deposition applications 4.  pp.279-289,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(4)
2.

Conference Proceedings
Conference Proceedings
2. Fully Depleted Silicon-on-Insulator nMOSFETs with Tensile Strained High Carbon Content Sil-yCy Channels
F. Ducroquet ; J. Hartmann ; C. Tabone ; D. Lafond ; C. Vizioz ; T. P. Ernst ; S. Deleonibus
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment.  pp.333-342,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(2)