1.

Conference Proceedings
Conference Proceedings
1. Dark-field high-transmission chromeless lithography
Bailey, G.E. ; Callan, N.P. ; Taravade, K.N. ; Jensen, J.V. ; Eynon, B.G. ; Martin, P.M. ; Kamberian, H.H. ; Taylor, D. ; Farnbach, R.S.
Pub. info.: Optical Microlithography XVI.  Part One  pp.203-214,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Imaging 100-nm contacts with high-transmission affenuated phase-shift masks
Beach, J.V. ; Petersen, J.S. ; Eynon, B.G. ; Taylor, D. ; Gerold, D.J. ; Maslow, M.J.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1242-1252,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings
Conference Proceedings
3. Limits of strong phase-shift patterning for device research
Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Yost, D. ; Snyder, J.P. ; Kasprowicz, B.S. ; Eynon, B.G. ; Liu, H.-Y.
Pub. info.: Optical Microlithography XVI.  Part One  pp.327-343,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings
Conference Proceedings
4. Back to square 9: a demonstration of 9-in. reticle capability
Cummings, K.D. ; Schneider-Stoermann, L.U. ; Buttgereit, U. ; Irmscher, M. ; Mueller, D. ; Hudek, P. ; Beyer, D. ; Brendel, B. ; Whittey, J.M. ; Eynon, B.G. ; Harsch, J. ; Constantine, C. ; Miller, K.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.15-24,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
5.

Conference Proceedings
Conference Proceedings
5. Inspection of chromeless AAPSM
Taylor, D. ; Lassiter, M. ; Eynon, B.G. ; Van Den Broeke, D.J. ; Chen, J.F.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1316-1319,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691