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11 results

Conference Proceedings

1. Hard x-ray Fresnel prisms: properties and applications

Ablett, J.M. ; Evans-Lutterodt, K. ; Stein, A.

Pub. info.:	Design and microfabrication of novel x-ray optics II : 5-6 August 2004, Denver, Colorado, USA. pp.88-94, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5539

Conference Proceedings

2. Imaging with single-dimension kinoform lenses

Stein, A. ; Ablett, J.M. ; Evans-Lutterodt, K. ; Taylor, A. ; Klemens, F. ; Kornblit, A. ; Polvino, S.

Pub. info.:	Design and microfabrication of novel x-ray optics II : 5-6 August 2004, Denver, Colorado, USA. pp.80-87, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5539

Conference Proceedings

3. Electroplated Damascene Copper: Process Influences on Recrystallization and Texture

Gross, M. E. ; Drese, R. ; Lingk, C. ; Brown, W. L. ; Evans-Lutterodt, K. ; Barr, D. ; Golovin, D. ; Ritzdorf, T. ; Turner, J. ; Graham, L.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.379-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

4. Submicron Resolution X-RAY Strain Measurements on patterned Films: Some Hows and Whys

Marcus, M. A. ; Macdowell, A. A. ; Isaacs, E. D. ; Evans-Lutterodt, K. ; Ice, G. E.

Pub. info.:	Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.545-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	428

Conference Proceedings

5. Energy-dependent focusing properties of a kinoform Fresnel lens

Evans-Lutterodt, K. ; Ablett, J.M. ; Stein, A. ; Tennant, D.M. ; Klemens, F. ; Taylor, A.

Pub. info.:	Design and microfabrication of novel x-ray optics II : 5-6 August 2004, Denver, Colorado, USA. pp.73-79, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5539

Conference Proceedings

6. Microtexture And Strain In Electroplated Copper Interconnects

Spolenak, R. ; Barr, D.L. ; Gross, M.E. ; Evans-Lutterodt, K. ; Brown, W.L. ; Tamura, N. ; Macdowell, A.A. ; Celestre, R.S. ; Padmore, H.A. ; Valek, B.C. ; Bravman, J.C. ; Flinn, P. ; Marieb, T. ; Keller, R.R. ; Batterman, B.W. ; Patel, J.R.

Pub. info.:	Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D10.3/G7.3-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	612

Conference Proceedings

7. Room Temperature Recrystallization Of Electroplated Copper Thin Films: Methods And Mechanisms

Walther, D. ; Gross, M.E. ; Evans-Lutterodt, K. ; Brown, W.L. ; Oh, M. ; Merchant, S. ; Naresh, P.

Pub. info.:	Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D10.1/G7.1-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	612

Conference Proceedings

8. Room Temperature Recrystallization of Electroplated Copper Thin Films: Methods and Mechanisms

Walther, D. ; Gross, M.E. ; Evans-Lutterodt, K. ; Brown, W.L. ; Oh, M. ; Merchant, S. ; Naresh, P.

Pub. info.:	Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.G7.1/D10.1-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	615

Conference Proceedings

9. Electroplated Damascene Copper: Process Influences on Recrystallization and Texture

Barr, D. ; Brown, W. L. ; Drese, R. ; Evans-Lutterodt, K. ; Golovin, D. ; Graham, L. ; Gross, M. E. ; Lingk, C. ; Ritzdorf, T. ; Turner, J.

Pub. info.:	Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.215-222, 1999. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	562

10.

Conference Proceedings

10. Microtexture and Strain in Electroplated Copper Interconnects

Pub. info.:	Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.G7.3/D10.3-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	615

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