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15 results

Conference Proceedings

1. Material design for immersion lithography with high refractive index fluid (HIF)

Kim, M. ; Kim, H. ; Shim, K. ; Jeon, J. ; Gil, M. ; Song, Y. ; Enomoto, T. ; Sakaguchi, T. ; Nakajima, Y.

Pub. info.:	Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.10-19, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5753(1)

Conference Proceedings

2. * FABRICATION PROCESS, APPLICATION AND FUTURE FOR AN ELEMENTAL LEVEL VERTICALLY INTEGRATED CIRCUIT (ELVIC)

Enomoto, T.

Pub. info.:	Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.. pp.383-394, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	53

Conference Proceedings

3. INFLUENCE OF THE SOI SURFACE MORPHOLOGY ON CRYSTAL ORIENTATION AND DEVICE CHARACTERISTICS

Kunio, T. ; Oyama, K. ; Enomoto, T.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.409-414, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Technical Paper

4. Revolution Control of Generator Diesel Engine by Neural network Controller.

Tsuchiya, T. ; Morishita, S. ; Enomoto, T. ; Sasaki, H. ; Yoshimura, M.

Pub. info.:	2003 SAE world congress : technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

Technical Paper

5. Research on Reduction of Harmonic Distortion of Inverter for Small Gas Engine Cogeneration System with Backup Function.

Enomoto, T. ; Sueyoshi, S. ; Tsuno, K. ; Yamaji, T.

Pub. info.:	2009 SAE world congress : technical paper. 2009. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2009

Technical Paper

6. Study of Power Generation Loss Decrease in Small Gas Engine Cogeneration.

Ueno, M. ; Eguchi, H. ; Enomoto, T. ; Ogawa, M.

Pub. info.:	2008 Small Engine Technology Conference and Exhibition : SAE technical paper. 2008. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2008

Technical Paper

7. A Study of Experimental Acoustic Model Analysis of Automotive Interior Acoustic Field Coupled with the Body Structure.

Tsuji, H. ; Enomoto, T.

Pub. info.:	2012 SAE world congress : technical paper. 2012. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2012

Conference Proceedings

8. Multi-layer resist system for 45-nm-node and beyond: Part II [6349-121]

Fujimura, Y. ; Morimoto, J. ; Manoshiro, A. ; Shimizu, M. ; Takamizawa, H. ; Hashimoto, M. ; Shiratori, H. ; Horii, K. ; Yokoya, Y. ; Ohkubo, Y. ; Enomoto, T. ; Sakaguchi, T. ; Nagai, M.

Pub. info.:	Photomask Technology 2006. pp.634936-634936, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

Conference Proceedings

9. Design and development of next-generation bottom anti-reflective coatings for 45.nm process with hyper NA lithography [6153-96]

Nakajima, M. ; Sakaguchi, T. ; Hashimoto, K. ; Sakamoto, R. ; Klshioko, T. ; Takei, S. ; Enomoto, T. ; Nakajima, Y.

Pub. info.:	Advances in Resist Technology and Processing XXIII. pp.61532L-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6153

10.

Conference Proceedings

10. Multi-layer resist system for 45-nm-node and beyond: part I [6349-18]

Hashimoto, M. ; Shiratori, H. ; Horii, K. ; Yokoya, Y. ; Ohkubo, Y. ; Takamizawa, H. ; Fujimura, Y. ; Morimoto, J. ; Manoshiro, A. ; Shimizu, M. ; Yokoyama, T. ; Enomoto, T. ; Nagai, M.

Pub. info.:	Photomask Technology 2006. pp.63490I-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

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Author: Enomoto, T.