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11 results

Conference Proceedings

1. Advanced industrial metrology used for qualification of high-quality optical materials

Engel, A. ; Westenberger, G. ; Bartelmess, L. ; Sohr, O. ; Haspel, R. ; Moersen, E.

Pub. info.:	Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA. pp.117-124, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4779

Conference Proceedings

2. Background-limited superconducting quantum detector for submillimeter astronomy

Semenov, A. ; Engel, A. ; Huebers, H.-W. ; Il'in, K. ; Siegel, M.

Pub. info.:	Millimeter and submillimeter detectors for astronomy : 25-28 August 2002, Waikoloa, Hawaii, USA. pp.249-253, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4855

Conference Proceedings

3. Advanced industrial fluorescence metrology used for qualification of high quality optical materials

Engel, A. ; Becker, H.-J. ; Sohr, O. ; Haspel, R. ; Rupertus, V.

Pub. info.:	Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA. pp.182-189, 2003. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5188

Conference Proceedings

4. Energy resolution of a superconductor quantum detector

Semenov, A. ; Engel, A. ; Hubers, H.-W. ; Il'in, K.

Pub. info.:	Optical and infrared detectors for astronomy : 21-22 June 2004, Glasgow, Scotland, United Kingdom. pp.310-315, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5499

Conference Proceedings

5. Layering in Halocarbons, Methane, Nitrous Oxide, Ozone, and Water Vapour over Mid-Latitudes

Orsolini, Y. ; Manney, C.L. ; Engel, A.

Pub. info.:	13th ESA Symposium on European Rocket and Balloon Programmes and Related Research : proceedings, Öland, Sweden, 26-29 May 1997. pp.187-192, 1997. Noordwijk, The Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	397

Conference Proceedings

6. Validation of tracer measurements by the Envisat chemistry instruments by means of in situ observations from balloon and aircraft

Engel, A. ; Volk, C.M ; Haase, H.P.

Pub. info.:	16th ESA Symposium on European Rocket and Balloon Programmes and Related Research, 2 - 5 June 2003, Sankt Gallen, Switzerland. pp.475-480, 2003. Noordwijk, The Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	530

Conference Proceedings

7. Improved materials meeting the demands for EUV substrates

Mitra, I. ; Alkemper, J. ; Nolte, U. ; Engel, A. ; Mueller, R. ; Ritter, S. ; Hack, H. ; Megges, K. ; Kohlmann, H. ; Pannhorst, W. ; Davis, M.J. ; Aschke, L. ; Knapp, K.

Pub. info.:	Emerging Lithographic Technologies VII. 1 pp.219-226, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5037

Conference Proceedings

8. Spectral response of an infrared superconducting quantum detector

Semenov, A. ; Engel, A. ; Hubers, H. -W. ; Il'in, K. ; Siegel, M.

Pub. info.:	Optical Sensing. pp.237-245, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5459

Conference Proceedings

9. CaF2 for DUV lens fabrication: basic material properties and dynamic light-matter interaction

Letz, M. ; Engel, A. ; Mannstadt, W. ; Parthier, L. ; Natura, U. ; Knapp, K.

Pub. info.:	Optical Microlithography XVII. pp.1797-1804, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

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Conference Proceedings

10. Optimized glass-ceramic substrate materials for EUVL applications

Mitra, I. ; Alkemper, J. ; Mueller, R. ; Nolte, U. ; Engel, A. ; Hack, H. ; Kohlmann, H. ; Wittmer, V. ; Pannhorst, W. ; Davis, M.J. ; Aschke, L. ; Knapp, K.

Pub. info.:	Emerging Lithographic Technologies VIII. pp.96-103, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5374

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Author: Engel, A.