1.

Conference Proceedings
Conference Proceedings
1. Combined use of x-ray reflectometry and spectroscopic ellipsometry for characterization of thin film optical properties [6155-25]
Cain, J. P. ; Robie, S. ; Zhang, Q. ; Singh, B. ; Emami, I.
Pub. info.: Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA.  pp.61550P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6155
2.

Conference Proceedings
Conference Proceedings
2. Intentional defect array wafers: their practical use in semiconductor control and monitoring systems
Emami, I. ; McIntyre, M. ; Retersdorf, M.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.82-86,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041