1.

Conference Proceedings
Conference Proceedings
1. Scanning array lens lithography for large-area applications
Wang,L.C. ; Markle,D.A. ; Ellis,R.J.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.271-286,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
2.

Conference Proceedings
Conference Proceedings
2. New array lens optical system for large-area micromachining lithography
Wang,L. ; Markle,D.A. ; Ellis,R.J. ; Jeong,H.J.
Pub. info.: Microlithography and Metrology in Micromachining II.  pp.210-223,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2880