1.

Conference Proceedings
Conference Proceedings
1. SPC tracking and run monitoring of a CD SEM
Allgair,J. ; Ruehle,D.G. ; Elliott,R.C. ; Herrera,P.P. ; Miller,J.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.243-251,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Effects of DUV resist sensitivities on lithographic process window
Kemp,K.G. ; Williams,D.J. ; Cayton,J.W. ; Steege,P. ; Slonaker,S. ; Elliott,R.C.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.955-962,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
3.

Conference Proceedings
Conference Proceedings
3. Sampling plan optimization for detection of lithography and etch CD process excursions
Elliott,R.C. ; Nurani,R.K. ; Lee,S.J. ; Ortiz,L.G. ; Preil,M.E. ; Shanthikumar,J.G. ; Riley,T. ; Goodwin,G.A.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.527-536,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
4.

Conference Proceedings
Conference Proceedings
4. Effects of DUV resist sensitivities on lithographic process window
Kemp,K.G. ; Williams,D.J. ; Cayton,J.W. ; Steege,P. ; Slonaker,S. ; Elliott,R.C.
Pub. info.: Microlithographic Techniques in IC Fabrication.  pp.49-56,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3183
5.

Conference Proceedings
Conference Proceedings
5. Statistical verification of multiple CD-SEM matching
Erickson,D. ; Sullivan,N.T. ; Elliott,R.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.93-100,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
6.

Conference Proceedings
Conference Proceedings
6. Characterization of optical proximity correction features
Allgair,J.A. ; Ivy,M. ; Lucas,K. ; Sturtevant,J.L. ; Elliott,R.C. ; Mack,C.A. ; MacNaughton,C.W. ; Miller,J.D. ; Pochkowski,M. ; Preil,M.E. ; Robinson,J.C. ; Santos,F.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.200-207,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
7.

Conference Proceedings
Conference Proceedings
7. Initial characterization results of a low-voltage CD SEM for reticle metrology
Quattrini,R. ; MacNaughton,C.W. ; Elliott,R.C. ; Ng,W. ; Malhotra,R. ; Ananth,M. ; Yee,J.C.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.154-159,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
8.

Conference Proceedings
Conference Proceedings
8. Benchmarking multimode CD-SEM metrology to 180 nm
Monahan,K.M. ; Askary,F. ; Elliott,R.C. ; Forcier,R.A. ; Quattrini,R. ; Sheumaker,B.L. ; Yee,J.C. ; Marchman,H.M. ; Bennett,R.D. ; Carlson,S.D. ; Sewell,H. ; McCafferty,D.C. ; Sumra,J. ; Yan,J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.480-493,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725