1.

Conference Proceedings
Conference Proceedings
1. The Influence of HF, 0H, and Dissolved 02 on Silicon Surface Chemical Cleaning
Higashi, G.S. ; Chabal, Y.J. ; Raghavachari, K. ; Becker, R.S. ; Green, M.P. ; Hanson, K. ; Boone, T. ; Eisenberg, J.H. ; Shive, S.F. ; DiBello, G.N. ; Fulford, K.L.
Pub. info.: Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993.  pp.189-198,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-13
2.

Conference Proceedings
Conference Proceedings
2. COMPARISON OF VAPOR-PHASE AND WET CHEMICAL PRE-GATE OXIDE AND PRE-CONTACT CLEANS
Draper, C.W. ; Anyanwu, V.E. ; Eisenberg, J.H. ; Felton, G.J. ; Roy, P.K. ; Chittipeddi, S. ; Bechtold, P.F. ; Hagner, G. ; Cooper, D. ; Syverson, D. ; Witowski, B. ; Van Eck, B. ; Gordon, M.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.392-400,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7