1.

Conference Proceedings
Conference Proceedings
1. GENERATION OF DEFECTS AND STRAIN BY ION IMPLANTATION IN Ge(100) SINGLE CRYSTALS, AND IN PSEUDOMORPHIC GeXSi1-X FILMS GROWN ON Si(100)
Lie, D. Y. C. ; Vantomme, A. ; Eisen, F. ; Nicolet, M.-A. ; Arbet-Engets, V. ; Wang, K. L.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.1079-1084,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
2.

Conference Proceedings
Conference Proceedings
2. STEADY-STATE VERSUS RAPID THERMAL ANNEALING OF PHOSPHORUS-IMPLANTED PSEUDOMORPHIC Si(100)/Ge0.12Si0.88
Lie, D. Y. C. ; Song, J. H. ; Theodore, N. D. ; Eisen, F. ; Nicolet, M. -A. ; Carns, T. K. ; Wang, K. L. ; Kinoshita, H. ; Huang, T-H. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.51-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
3.

Conference Proceedings
Conference Proceedings
3. Dopant activation and epitaxial regrowth in p-implanted pseudomorphic Ge0.12Si0.88 layers on Si(100)
Lie, D. Y. C. ; Carns, T. K. ; Theodore, N. D. ; Eisen, F. ; Nicolet, M. -A. ; Wang, K. L.
Pub. info.: Crystallization and related phenomena in amorphous materials : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.485-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 321