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38 results

Conference Proceedings

1. Combination of guided wave and free-space micro-optics for a new optical backplane concept

Frese,I. ; Kufner,S. ; Kufner,M. ; Hochmuth,G. ; Bauer,H.-D. ; Ehrfeld,W.

Pub. info.:	ROMOPTO 2000, Sixth Conference on Optics, 4-7 September 2000, Bucharest, Romania. pp.715-721, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4430

Conference Proceedings

2. Progress and profit through microtechnologies: commercial applications of MEMS/MOEMS

Ehrfeld,W. ; Ehrfeld,U.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.1-10, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

3. Tools and methods for automated assembly of mlniaturized gear systems

Nienhaus,M. ; Ehrfeld,W. ; Berg,U. ; Schmitz,F. ; Soultan,H.

Pub. info.:	Microrobotics and microassembly II : 5-6 November 2000, Boston. pp.33-43, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4194

Conference Proceedings

4. Application of new actuator and vision control systems for micro-electro-discharge machining

Wolf,A. ; Ehrfeld,W. ; Michel,F. ; Koch,O. ; PreuB,S. ; Soultan,H. ; Cruber,H.P.

Pub. info.:	Intelligent systems in design and manufacturing. pp.149-158, 1998. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3517

Conference Proceedings

5. Ultraprecision microelectroforming of metals and metal alloys

Lowe,H. ; Ehrfeld,W. ; Diebel,J.

Pub. info.:	Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.168-175, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3223

Conference Proceedings

6. Manufacturing microcomponents for optical information technology using the LIGA technique

Bauer,H.-D. ; Ehrfeld,W. ; J.Hoｦﾂfeld ; Paatzsch,T.

Pub. info.:	Optical fabrication and testing : 26-28 May 1999, Berlin, Germany. pp.224-229, 1999. Bellingham, WA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3739

Conference Proceedings

7. Micromachined aperture probe tip for multifunctional scanning probe microscopy

Abraham,M. ; Ehrfeld,W. ; Lacher,M. ; Marti,O. ; Mayr,K. ; Noell,W. ; Guthner,P. ; Barenz,J.

Pub. info.:	Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG. Part 1 pp.248-256, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3099

Conference Proceedings

8. Contactless embossing ot microlenses:a new technology for manufacturing refractive microlenses

Schulze,J. ; Ehrfeld,W. ; Lowe,H. ; Michel,A. ; Picard,A.

Pub. info.:	Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG. Part 1 pp.89-98, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3099

Conference Proceedings

9. Refractive microlens arrays made by contactless embossing (Invited Paper)

Picard,A. ; Ehrfeld,W. ; Lowe,H. ; Muller,H. ; Schulze,J.

Pub. info.:	Precision plastic optics for optical storage, displays, imaging, and communications : 30-31 July 1997, San Diego, California. pp.96-105, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3135

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Conference Proceedings

10. Fabrication of plastic microparts on wafer level

Weber,L. ; Ehrfeld,W. ; Begemann,M. ; Berg,U. ; Michel,F.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.44-52, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874

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