1.

Conference Proceedings
Conference Proceedings
1. The Best Way to Obtain Good Quality CVD-TiN Films From TiCl4 and NH3
Hamamura, Hirotaka ; Shimogaki, Yukihiro ; Akiyama, Yasunobu ; Egashira, Yasuyuki ; Komiyama, Hiroshi
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.501-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. Vapor Treatments of Spin-On Mesostructured Silica Films for the Enhancement of Structural Stability
Tanaka, Shunsuke ; Nishiyama, Norikazu ; Egashira, Yasuyuki ; Oku, Yoshiaki ; Ueyama, Korekazu
Pub. info.: Self-assembled nanostructured materials : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.35-40,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 775
3.

Conference Proceedings
Conference Proceedings
3. Ordered Mesoporous Silica Films Synthesized From Vapor Phase
Tanaka, Shunsuke ; Nishiyama, Norikazu ; Egashira, Yasuyuki ; Oku, Yoshiaki ; Ueyama, Korekazu
Pub. info.: Self-assembled nanostructured materials : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.41-46,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 775