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14 results

Conference Proceedings

1. Nanoindentation Of Silicate Low-K Dielectric Thin Films

Vella, Joseph B. ; Volinsky, Alex A. ; Adhihetty, Indira S. ; Edwards, N.V. ; Gerberich, William W.

Pub. info.:	Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.619-626, 2002. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	716

Conference Proceedings

2. Characterization of High-k Dielectric Films with Tunneling AFM

Wang, Xiang-Dong ; Kulik, Joe ; Edwards, N.V. ; Samavedam, S.B. ; Lu, Shifeng

Pub. info.:	Spatially resolved characterization of local phenomena in materials and nanostructures : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.. pp.183-376, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	738

Conference Proceedings

3. Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool For Relative Porosity Measurements of Low- K Dielectric Films

Edwards, N.V. ; Vella, J. ; Xie, Q. ; Zollner, S. ; Werho, D. ; Adhihetty, I. ; Liu, R. ; Tiwald, T.E. ; Russell, C. ; Vires, J. ; Junker, K.H.

Pub. info.:	Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.. pp.101-106, 2002. Warrendale, Penn. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	697

Conference Proceedings

4. Determination and Critical Assessment of the Optical Properties of Common Substrate Materials Used in III-V Nitride Heterostructures with Vacuum Ultraviolet Spectroscopic Ellipsometry

Edwards, N.V. ; Lindquist, O.P.A. ; Madsen, L.D. ; Zollner, S. ; Jarrehdahl, K. ; Cobet, C. ; Peters, S. ; Esser, N. ; Konkar, A. ; Aspnes, D.E.

Pub. info.:	GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.. pp.509-514, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	693

Conference Proceedings

5. Residual Stress and Microstructure of Electroplated Cu Film on Different Barrier Layers

Volinsky, Alex A. ; Hauschildt, Meike ; Vella, Joseph B. ; Edwards, N.V. ; Gregory, Rich ; Gerberich, William W.

Pub. info.:	Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.. pp.27-34, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	695

Conference Proceedings

6. Optical Vibrational and Structural Properties of Ge1-xSnx Alloys by UHV-CVD

Taraci, Jennifer ; Zollner, S. ; McCartney, M.R. ; Menendez, Jose ; Smith, D.J. ; Tolle, John ; Bauer, M. ; Duda, Erika ; Edwards, N.V. ; Kouvetakis, J.

Pub. info.:	Progress in semiconductor materials for optoelectronic applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A. pp.631-636, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	692

Conference Proceedings

7. Photo-Assisted MOVPE Growth of ZnMgS on (100) Si

Rodriguez, Angel ; Shattuck, Jeremy ; Zhang, Ziaoguang ; Smith, D.J. ; Tolle, John ; Bauer, M. ; Duda, Erika ; Edwards, N.V. ; Kouvetakis, J.

Pub. info.:	Progress in semiconductor materials for optoelectronic applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A. pp.625-630, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	692

Conference Proceedings

8. Ordinary and Extra-Ordinary Dielectric Function of 4H- and 6H-SiC in the 0.7 to 9.0 eV Photon Energy Range

Limdquist, O.P.A. ; Jaerrendahl, K. ; Arwin, H. ; Peters, S. ; Zettler, J.-T. ; Cobet, C. ; Esser, N. ; Aspnes, D.E. ; Henry, A. ; Edwards, N.V.

Pub. info.:	Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	640

Conference Proceedings

9. Mechanical Properties and Porosity of Organo-silicate Glass (OSG) Low-k Dielectric Films

Vella, J.B. ; Xie, Q. ; Edwards, N.V. ; Kulik, J. ; Junker, K.H.

Pub. info.:	Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.. pp.309-316, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	695

10.

Conference Proceedings

10. Growth and Doping of AlxGa1-xN Deposited Directly on α(6H)-SiC(0001) Substrates Via Organometallic Vapor Phase Epitaxy

Bremser, M.D. ; Perry, W.G. ; Edwards, N.V. ; Zheleva, T. ; Parikh, N. ; Aspnes, D.E. ; Davis, R.F.

Pub. info.:	Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition. pp.402-407, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-5

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Author: Edwards, N.V.