1.

Conference Proceedings
Conference Proceedings
1. Use of Transmission Electron Microscopy for the Characterization of the Structure of Pt/PZT/Pt/TiN/Ti/SiO2/Si Correlation with Electrical Properties
Verniere, F. ; Eakim, B. ; Aubert, P. ; Ayguavives, F. ; Agius, B. ; Bisaro, G.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.309-316,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
2.

Conference Proceedings
Conference Proceedings
2. Correlation between Insitu Optical Emission Spectrocopy of a O2/Ar Reactive Plasma and Composition of PZT Thin Film Deposited from Metallio Target by RF Magnetron Sputtering
Ayguavives, F. ; Aubert, P. ; Eakim, B. ; Machu, A. ; Varniere, F. ; Agius, B.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.299-308,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
3.

Conference Proceedings
Conference Proceedings
3. PHYSICOCHEMICAL AND MICROSTRUCTURAL CHARACTERIZATION OF RF SPUTTERING MAGNETRON Pb(Zr,Ti)O3 THIN FILMS
Varniere, F. ; Cattan, E. ; Eakim, B. ; Achard, H. ; Agius, B.
Pub. info.: Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A..  pp.23-,  1992.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 310