1.
Conference Proceedings
B. Schulz ; R. Seltmann ; J. Busch ; F. Hempel ; E. Cotte ; B. Alles
Pub. info.:
Metrology, inspection, and process control for microlithography XXI . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
2.
Conference Proceedings
B. Alles ; B. Simeon ; E. Cotte ; T. Wandel ; B. Schulz ; R. Seltmann
Pub. info.:
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6533
3.
Conference Proceedings
B. Alles ; E. Cotte ; B. Simeon ; T. Wandel
Pub. info.:
Optical Microlithography XXI . 3 pp.69244P-1-69244P-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
4.
Conference Proceedings
K. Bubke ; E. Cotte ; J. H. Peters ; R. de Kruif ; M. Dusa
Pub. info.:
Photomask technology 2007 . 1 pp.67301H-1-67301H-10, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6730