Adam, L. S. ; Law, M. E. ; Dokumaci, O. ; Haddara, Y. ; Murthy, C. ; Park, H. ; Hegde, S. ; Chidambarrao, D. ; Mollis, S. ; Domenicucci, T. ; Dziobkowski, C. ; Jones, K. ; Wong, P. ; Young, R. ; Srinivasan, R.
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Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.277-, 1999. Warrendale, PA. MRS - Materials Research Society
Dziobkowski, C. ; Bruley, J. ; Coffin, J. ; Falcon, D. ; Flaitz, P. ; Klymko, N. ; McMurray, J. ; Ronsheim, P. ; Wildman, H. ; Zaitz, M.
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Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.580-592, 2001. Pennington, N.J.. Electrochemical Society
Domenicucci, A. ; Dehm, C. ; Loh, S. ; Clevenger, L. A. ; Dziobkowski, C. ; Cabral, C. ; Lavoie, C. ; Jorden-Sweet, J.
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Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.3-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society